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Advanced resonant characterization of MEMS devices

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If you have a question about this talk, please contact Dr. Richard, Yong Qing Fu.

An ‘optical lever’ setup has been developed for mechanical testing of micro mechanical (MEMS) structures. This system is assembled using off the shelf components and allows study of a structures response to an internally applied mechanical excitation under different chamber pressures below 1e-5 mbar and temperatures up to 160 oC. Data processing via Matlab allows the use of various modal analysis tools, typically to determine the samples resonant frequencies and respective quality factors. A study of Silicon nitride and SU8 rectangular cantilevers using this setup is demonstrated.

This talk is part of the MEMS seminar series.

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