Advanced resonant characterization of MEMS devices

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• Iskandar Samad, CAPE, Engineering Department
• Wednesday 01 November 2006, 14:00-15:00
• CAPE building, seminar room 21-23. 9 JJ Thomson Ave. CB3 0FA.

If you have a question about this talk, please contact Dr. Richard, Yong Qing Fu.

An ‘optical lever’ setup has been developed for mechanical testing of micro mechanical (MEMS) structures. This system is assembled using off the shelf components and allows study of a structures response to an internally applied mechanical excitation under different chamber pressures below 1e-5 mbar and temperatures up to 160 oC. Data processing via Matlab allows the use of various modal analysis tools, typically to determine the samples resonant frequencies and respective quality factors. A study of Silicon nitride and SU8 rectangular cantilevers using this setup is demonstrated.

This talk is part of the MEMS seminar series.

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