Abstract

There are many modern materials and devices where an understanding of the structure, composition and chemistry on the atomic scale is crucial to achieving the performance sought from them. The modern nanoanalytical electron microscope can record a range of analytical data (e.g. electron and x-ray spectra) at each pixel in an image with a spatial resolution approaching atomic size in a normal microscope and better than atomic size in an aberration corrected microscope. Thus we have the ability to provide a great deal but not all the information sought. Challenges are presented when the are a wide range of atomic numbers present or when one element is present in a low concentration. Benefits come from the chemical information present in the fine structure on ionisation edges. A range of examples ranging from semiconductors to steels will be used to illustrate what is possible.