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Depletion Layer Actuators

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The uncompensated donor or acceptor atoms present within the depletion layer of a diode can be employed in an electrostatic actuator which utilizes the force between them and their opposing charges on the other side of the junction. In this work we describe the theory of such a depletion layer actuator and demonstrate its application for the simple case of a shottky diode located on the top surface of a cantilever resonator. Initial results demonstrate that the technique works and are in reasonable agreementt with the device theory.

This talk is part of the Sensors & Actuators Seminar Series series.

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