NEXTorr: A novel route to compact, high performance pumping in UHV-XHV vacuum systems
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If you have a question about this talk, please contact Linda Whyles.
The presentation will cover first some theoretical and practical aspects of Non-Evaporable Getter (NEG) pumps technology, particularly efficient in pumping Hydrogen, the main gas species present at UHV levels.
Then the NEX Torr pump concept will be introduced: the pump has been conceived as a combination of a NEG pump with a small Ion Pump, in order to provide performances better than conventional ion pumps in a smart miniaturized assembly several tens of times smaller and lighter.
Examples of real use in a variety of cold trap systems as well as in other applications will be shown and discussed.
This talk is part of the Surface, Microstructure & Fracture group series.
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