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Optics and MEMS: A powerful combination with many applications

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Moving micromechanical structures combined with laser light sources and micro-optics enable a number of powerful applications in displays and imaging. Various electromagnetic, electrostatic, and piezoelectric actuator configurations are explored for high-performance scanning systems to achieve high-frequency and large deflections. I will describe some of the sensors and actuators developed in our lab and discuss the following on-going projects: MEMS Scanners for laser projection applications and 3D displays, MEMS Fourier transform spectrometers, MEMS sensor array with integrated optical readout for thermal imaging, and resonant cantilever biosensors for multianalyte detection for point of care diagnostics.

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