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Micromechanical Resonators for Measuring Charge

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If you have a question about this talk, please contact Joshua En-Yuan Lee.

Micromechanical (MEMS) resonators have gained increasing interests in the past few decades for their potential as mechanical oscillators, mass sensors, strain sensors, and accelerometers. This talk focuses on their application for the measurement of miniscule quantities of charge as micro-electrometers. A MEMS electrometer with a measured charge noise floor below 10 electrons at ambient pressure and room temperature is presented, with suggestions for optimizing the performance to achieve single-electron resolution.

This talk is part of the Sensors & Actuators Seminar Series series.

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