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Block copolymer directed self-assembly for lithographic applications

UserDr. Hiroshi Yoshida, Chief Researcher, Hitachi Research Laboratory, Hitachi, Ltd..

HouseMicroelectronics Research Centre Seminar Room, Cavendish Laboratory (or Bragg Room 213 if unavailable).

ClockFriday 23 October 2009, 14:00-15:00

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