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SUMMARY:MEMS for precision sensing - Dr Ashwin Seshia\, Cambridge Nanoscie
 nce Centre
DTSTART:20070320T105000Z
DTEND:20070320T111500Z
UID:TALK6799@talks.cam.ac.uk
CONTACT:Liam Garvey
DESCRIPTION:Micro-Electro-Mechanical Systems (MEMS) technology has enabled
  a plethora of sensor applications driven by power\, cost and size conside
 rations\, as well as the potential for integration with CMOS electronics. 
 In this talk\, I will look at methods to exploit mechanical gain at the mi
 croscale to enhance the resolution of integrated MEMS sensors. Our group h
 as demonstrated MEMS-based sensors for the measurement of a variety of phy
 sical and chemical parameters at higher resolution than what is \nachievab
 le with many other sensor technologies. In particular\, by leveraging mech
 anicalgain at the microscale it is possible to detect forces on the order 
 of tens of femtonewtons\, displacements of well under a picometre and char
 ges of under 10 electrons per rt-Hz at room temperature and ambient pressu
 re. These sensors have enabled the development of complex microsystems wit
 h applications as disparate as inertial navigation\, biosensing and miniat
 urised mass spectrometry.\n
LOCATION:Kaetsu Centre\, New Hall
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