Abstract

Many bio-chemical sensing applications require ultra sensitive, low cost and disposable sensors. Conventional silicon based materials tend to be expensive, less sensitive and not suitable for disposable applications. In this work we present a novel polymer process technology for realization of a highly sensitive nano-particle based piezo-resistive polymer composite cantilevers that can be fabricated at sub 100o C process temperatures. Electro-mechanical characterization of the fabricated microcantilevers yielded a resonance frequency which is a few tens of kHz and a deflection sensitivity in the range of 1.1 ppm (ΔR/R) for a nanometer of deflection. These cantilevers have been used for a range of applications such as for detection of explosive molecules such as TNT /RDX in the parts-per-trillion level of concentrations as well as for developing an integrated system to provide point-of-care diagnostic support for cardiovascular diseases. Prototypes of these systems are currently under development for field trials.