Abstract

Two different fabrication routes can be adopted for building complex micro devices: top-down and bottom-up approaches. The top-down approach based on conventional photolithography brought us amazing CMOS manufacturing triumph but it is now facing a fundamental limit in scaling and cost. Recently, various bottom-up manufacturing technologies have received attention and promise to overcome some of the limits of top-down manufacturing.

Self-assembly is one promising way to lower manufacturing cost and realise complex microsystems.

In this talk, I will present the concept of smart scalable systems, a new bottom-up view point of building complex systems. First, optofluidic maskless lithography will be presented as a first step for smart particle generation. Second, various fluidic self-assembly technology such as railed microfluidics will be presented as a smart particle assembly method. Then I will end with a few application examples such as encoded particle based scalable biosensor or scalable displays.